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| Process kit clean recycle for semiconductors, FPD manufacturing equipment. | |
 Process module :
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Etching / Thin Film / Diffusion / Photo |
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Equipment System :
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AMAT / TEL / LAM / ANELVA / Novellus / Mattson / Shimadzu / Centrotherm / Roth & Rau / Oerlikon / Applied Film |
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Substrate Material :
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AL / SUS / Ti / Quartz / Ceramic |
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Process Deposition :
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Oxide / Poly / Metal / Wsi / AL / CU / Ti / TiN / TaN / TCO / Ag |
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